Semiconductors for Micro- and Nanotechnology An Introduction for Engineers

Semiconductors play a major role in modern microtechnology, especially in microelectronics. Since the dimensions of new microelectronic components, e.g. computer chips, now reach nanometer size, semiconductor research moves from microtechnology to nanotechnology. An understanding of the semiconductor physics involved in this new technology is of great importance for every student in engineering, especially electrical engineering, microsystem technology and physics. This textbook emphasizes a system-oriented view of semiconductor physics for applications in microsystem technology. While existing books only cover electronic device physics and are mainly written for physics students, this text gives a more hands-on approach to semiconductor physics and so avoids overloading engineering students with mathematical formulas not essential for their studies.

Jan G. Korvink earned his M.Sc. in computational mechanics from the University of Cape Town in 1987, and his Ph.D. in applied computer science from the ETH Zurich in 1993. He joined the Physical Electronics Laboratory of the ETH Zurich, where he established and lead the MEMS Modelling Group. In 1997 he became a professor for microsystems engineering at Albert Ludwig University in Freiburg, Germany. Prof. Korvink is author or co-author of more than 200 technical publications in the broad area of microsystems. He has written a textbook, numerous book chapters and edited volumes.

Andreas Greiner is full professor for Macromolecular Chemistry and Technology at the Philipps-University of Marburg, Germany. He studied chemistry at the University of Marburg and earned his doctorate there in 1988. After a postdoctoral stay with D. Pearson and H.W. Schmidt in Santa Barbara, he returned to Marburg, where he completed his habilitation in macromolecular chemistry in 1995. In the same year, he took up a professorship at the University of Mainz, and in 2000, he became full for Professor of Macromolecular Chemistry and Technology in Marburg. His research interests include the classical synthesis of monomers and polymers, specialty processing like electrospinning, polymer-nanoparticle conjugates, as well as the applications of polymers in optics, electronics, and medicine.